November 28, 2023
On the measurement of ultra-low mass of deposited particles with micromechanical mode-localized detectors
The report is devoted to methods for measuring ultra-low mass of deposited particles using micromechanical sensors based on the phenomenon of mode localization. Two types of sensitive elements of a mass detector are considered – a beam with an initial curvature and a system of two mechanically weakly coupled beams. In the first case, mass detection is supposed to be carried out by the amplitude ratio of beam vibrations on different natural modes. It is shown that with the correct choice of geometric parameters in the system, an exchange of energy is observed between the first asymmetric and second symmetric modes of vibration. The work proposes a system of electrodes that makes it possible to excite and detect vibrations in selected forms. In the case of a system of two weakly coupled beams, it is shown that in the presence of a disturbance in the form of a deposited particle, an oscillation mode with different amplitudes is observed in the system, the ratio of which is the output signal of the device. A comparison is made of the output characteristics of the devices, primarily sensitivity, with known mass detectors presented in the literature.